Thin film thickness sensor based on a new magnetostrictive delay line arrangement

Abstract

In this paper we demonstrate the application of a new magnetostrictive delay line (MDL) arrangement in thin film thickness determination, during film production. According to this new set-up, the MDL arrangement can be miniaturized in the micrometer scale, without the use of coils and air gaps, thus allowing a simple and cost-effective manufacturing process. Experimental results indicate monotonic response and absence of hysteresis, thus allowing a good uncertainty of measurement.