Abstract
In this study, we developed a microbolometer chip fabricated from high temperature superconducting Bi2Sr2CaCu2O8+δ (Bi2212) single crystals for the terahertz (THz) detection. For the manufacturing of the microbolometer chips, Bi2212 single crystals were transferred on substrate in the thin film like form and electron beam lithography, ion beam etching techniques were used. Resistance versus temperature behavior of the bolometer chips were performed by four probe technique in liquid nitrogen cryostat. Bi2212 microchips were integrated and characterized using in our custom-designed cryogenic bolometer system instead of expensive and massive cooling systems. The fabricated microchips significantly detected signals from the Stefan-Boltzmann lamp which includes a portion of THz radiation. The detected power and response time were studied for Bi2212 thin film like microbolometer chips. Our results demonstrated the feasibility of improved Bi2212 microchips could be used for bolometric detection for THz applications.
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