Abstract
Molecular beam epitaxy (MBE) growth of YBa 2 Cu 3 0 7−δ a (YBCO) is monitored using reflection high energy electron diffraction (RHEED) in the sequential deposition of constituent metals under continuous pure ozone flow. The intensity of the RHEED specular beam oscillates with a period equivalent to the formation of one unit cell. Each oscillation has a characteristic structure corresponding to each atomic layer supplied. Possible atomic layer formation is discussed.
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