Year-end Sale % OFF 
Abstract
This paper discusses the application of ZnO/Pyrex-glass composite diaphragm structure to thin-film bulk acoustic resonators (FBARs). Analysis of ZnO/Pyrex-glass composite diaphragm structure showed for thickness-longitudinal vibration that zero temperature coefficient of frequency with relatively large electromechanical coupling constant of about 20% is realised for the second- and third-order resonances as well as for the fundamental resonance. An FBAR employing the ZnO/Pyrex-glass composite diaphragm structure was fabricated, and Q values of 970 and 858 were obtained, respectively, for the fundamental and second-order resonances at 298.7 MHz and 497.5 MHz.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
