Abstract
The FeCoBSi thin fllms were deposited on the ∞exible mylar substrates by DC magnetron sputtering. The as-deposited fllms showed as an amorphous structure. Permeability characteristics in the range of 0.5{18GHz were investigated. The values of permeability increased with an increasing thickness of the fllms when the thickness was less than 1m. This unusual result may be due to the various microstructures, stress or defects of the fllms. When the thickness was more than 1m, the values of both permeability and resonance frequency decreased signiflcantly. The results may be attributed to the increase of eddy current loss. The electric properties, including sheet resistance and resistivity for the fllms with various thicknesses, have also been investigated.
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