Abstract
The FeTaN thin films were deposited on the flexible plastic substrates by rf magnetron sputtering. Good soft magnetic properties with coercivity <10Oe have been obtained in the films with thickness <250nm. Relatively high values of the complex permeability and ferromagnetic resonance frequency were obtained and they can be adjusted by changing the film thickness. However, compared to the films on the rigid substrate, a decrease of the permeability level and a shift of the resonance peak in the permeability spectra have been noticed for the films on the flexible substrate. The electric properties, including sheet resistance, resistivity, and magnetoresistance for the films with various thicknesses, have also been investigated.
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