Abstract
Thickness-dependent (001) orientation and surface morphology of rapid-annealed FePt thin films were investigated. For the rapid annealed FePt films with different thicknesses (5–60 nm), the ordering parameters were obtained to be higher than 0.9. As film thickness (t) was increased from 5 to 20 nm, the Lotgering orientation factor (LOF) increased from 0.75 to 0.99 (nearly perfect 00l texture), and then decreased to 0.85 for films with t = 60 nm. Surface morphology observation indicates an evolution from a continuous to island-like structure with decreasing t. Due to high temperature annealing, the surface atomic diffusion and substrate-film interfacial diffusion results in the de-wetting of film structure, when t is thin. This morphological change leads to the stress-relaxation of the preformed tensile stress induced by the impingement of grain growth, which further causes a decrease of LOF.
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