Thickness dependence of superconductivity in rf-sputtered Y-Ba-Cu-O thin films

Abstract

Y-Ba-Cu-O thin films (100–730 nm) with small grains and a smooth surface have been fabricated by rf diode sputtering. The values of transition temperature Tc and critical current density Jc for the film (730 nm thickness) on SrTiO3 are 65 K and 1.2×105 A/cm2 at 4.2 K, respectively. The thickness dependence of Tc and Jc for the patterned films shows that Tc and Jc are almost constant for films with a thickness d≥200 nm.