Abstract
Herein, we report the thermophysical properties of dichloro-[2,2]-paracyclophane (the parylene C dimer) under vacuum. The parylene C dimer is the raw material used to prepare parylene C, a thin film known for its useful dielectric and barrier properties. In order to investigate the first step in the synthesis of parylene C by chemical vapor deposition, the sublimation, evaporation, and melting behavior of the parylene C dimer was examined by simultaneous thermogravimetry/differential thermal analysis (TG–DTA) under vacuum and at atmospheric pressure. The evaporation onset temperatures, saturation vapor pressures, and the phase-transition temperatures of the parylene C dimer were quantified by TG–DTA at various pressures. The evaporation and sublimation temperature easily decreased by increasing the level of vacuum, while the melting temperature was independent of the external pressure. Our results led to the construction of a pressure–temperature phase diagram.
Highlights
Poly(p-xylylene), discovered by Szwarc1) and often referred to by its trade name “parylene”, is a polymer that possess useful dielectric and barrier properties
In order to investigate the first step in the synthesis of parylene C by chemical vapor deposition, the sublimation, evaporation, and melting behavior of the parylene C dimer was examined by simultaneous thermogravimetry/differential thermal analysis (TG–DTA) under vacuum and at atmospheric pressure
Experiments23,24) and Yase et al measured evaporation rates of functional organic compounds by quadrupole mass spectrometry.25,26) We have reported the thermal behavior of ionic liquids and organic compounds under vacuum in our previous work.27,28) With this in mind, it should be possible to examine the thermal properties of the parylene C dimer by thermogravimetry/differential thermal analysis (TG–DTA)
Summary
Poly(p-xylylene), discovered by Szwarc1) and often referred to by its trade name “parylene”, is a polymer that possess useful dielectric and barrier properties. These monomers are transported into the deposition chamber, which is held at room temperature and where polymerization occurs as monomer radicals are deposited on a substrate This polymerization process is mostly performed at a vacuum of around 20 Pa. Research into the characteristics of parylene C, such as its mechanical, electronic, and biocompatibility properties, and how they relate to the thickness and the vapor-phase polymerization conditions has been reported.15–17) There have been studies into surface modifications using techniques such as plasma etching18,19) and annealing,20) which were aimed at improving the above-mentioned qualities such that they meet application standards. We focused on the sublimation and evaporation behavior of the parylene C dimer because it is the first step in the formation of parylene C by chemical vapor deposition. We studied the phases of the parylene C dimer under vacuum and constructed a pressure–temperature (P–T) phase diagram
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