Abstract
Thermoelectric hydrogen sensors with different catalyst oxides, Pt-Al2O3 and Pt-CeO2 have been prepared, and their gas sensing properties are investigated in the air and N2 flow. In air, the relationship between the sensor output and the gas concentration is a linear indicating the combustion only depends on the gas concentration in air. In N2 atmosphere, where the oxygen gas content of N2 source cylinder is below the industrial standard of 50 ppm, the sensor output shows also a linear relationship with the gas concentration, but depressed signal level. The microheater of the thermoelectric sensor has been prepared by the co-sputtering of tungsten and platinum to enhance the high temperature stability. The temperature coefficients of the Pt-W alloy multilayer heater were lowered to a half of the level of Pt.
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