Thermoelastic damping in trilayered microplate resonators

Abstract

The design of laminated composite microplate resonators with high quality (Q) factors requires careful analysis of thermoelastic damping since it is an inherent intrinsic energy dissipation mechanism. This paper presents a temperature field in a general trilayered microplate with thermally perfect interfaces based on the integral transform approach. In addition, an analytical model to calculate thermoelastic damping in general trilayered fully clamped microplates is developed. Total thermoelastic damping for trilayered microplates can be expressed as a sum of the normalized energy dissipated in each layer. In order to validate the present model, the results calculated by the present model are compared with those calculated by finite element method (FEM). Our results show that the energy dissipation in the middle part is less than that in the outer parts for homogenous microplates. Thermoelastic damping peaks in trilayered microplates are discussed, which are associated with the critical damping frequency and the Zener's modulus of each layer. When the Zener's modulus of one layer is 2–3 orders of magnitude higher than that of another layer and the critical damping frequency of this layer is also 2–3 orders of magnitude higher than that of another layer, the thermoelastic dissipation spectrum will exhibit multiple peaks. It is also observed that the second layer may exhibit negative energy dissipation in SiC/Ti/Au and Si3N4/Si/Au trilayered microplates.