Thermoelastic damping in torsion microresonators with coupling effect between torsion and bending

Abstract

Predicting thermoelastic damping (TED) is crucial in the design of high Q MEMS resonators. In the past, there have been few works on analytical modeling of thermoelastic damping in torsion microresonators. This could be related to the assumption of pure torsional mode for the supporting beams in the torsion devices. The pure torsional modes of rectangular supporting beams involve no local volume change, and therefore, they do not suffer any thermoelastic loss. However, the coupled motion of torsion and bending usually exists in the torsion microresonator when it is not excited by pure torque. The bending component of the coupled motion causes flexural vibrations of supporting beams which may result in significant thermoelastic damping for the microresonator. This paper presents an analytical model for thermoelastic damping in torsion microresonators with the coupling effect between torsion and bending. The theory derives a dynamic model for torsion microresonators considering the coupling effect, and approximates the thermoelastic damping by assuming the energy loss to occur only in supporting beams of flexural vibrations. The thermoelastic damping obtained by the present model is compared to the measured internal friction of single paddle oscillators. It is found that thermoelastic damping contributes significantly to internal friction for the case of the higher modes at room temperature. The present model is validated by comparing its results with the finite-element method (FEM) solutions. The effects of structural dimensions and other parameters on thermoelastic damping are investigated for the representative case of torsion microresonators.