Thermodynamics characteristics of MEMS infrared thin film.

Abstract

This work demonstrates a micro electro mechanical system (MEMS) technology based infrared thin film, which converts absorbed visible light energy into infrared radiation. The principle of the film and the experiment for studying its thermodynamic characteristics are presented. The radiation spectrum of the thin film conforms to the characteristics of blackbody spectrum, and the average emissivity in infrared band is 0.638. The thermal diffusion distance decreases with the decrease of substrate thickness. Moreover, the fabrication of periodic pixel arrays on substrates can effectively reduce the thermal conductivity. The thermal conductivity of the pixel inscribed thin film with a substrate thickness of 360nm is 0.1W/m·K. The temporal constant decreases with the decrease of substrate thickness. The time constant of the film with a substrate thickness of 360nm is 2.72ms while the working temperature is 5 degrees Celsius. These characteristics indicate that the infrared thin film has a promising application prospect in infrared scene projection.