Abstract

The Knudsen mass spectrometry and static method are used to investigate the composition of vapor and thermodynamic properties of silicon–phosphorus melts in the temperature range from 1507 to 1831 K and in the range of compositions of 0.09 to 26.5 at. % P. About a hundred values of activity for phosphorus are obtained with different compositions and/or temperatures. The thermodynamic functions of liquid Si–P alloys are approximated using the model of ideal associated solutions with two associates SiP and Si2P. The limits of stability of the liquid phase in the diagram of state for the Si–P system are calculated on the basis of the obtained thermodynamic data and their model description. Good agreement is observed between the calculation results and the available experimental data.

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