Abstract
Factors involved in the evaluation of the thermochemical properties of gaseous metal halides are discussed, and the mass spectrometric-equilibrium method for determining these properties is described. Methods for interpreting the measurements and deriving the results are reviewed, using the Mo-F system as an example. The use of thermochemical data in evaluating the equilibrium behavior of metal-halogen systems is described, along with applications to the analysis of the kinetics of gas-solid reactions occuring in chemical evaporation processes.
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