Abstract
In this study, SU-8 and its composites are fabricated by blending 10 wt.% hexagonal boron nitride (h-BN) fillers with/without lubricants, such as 10 wt.% base oil (SN150) and 20 wt.% perfluoropolyether (PFPE). The thickness of SU-8 and its composites coating is fabricated in the range ∼100–105 ±m. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s, the reduction in the initial and steady-state coefficient of friction is obtained to be ∼0.08 and ∼0.098, respectively, in comparison to SU-8 (∼0.42 and ∼0.75), and the wear resistance is enhanced by more than 103 times that of pure SU-8. Moreover, the thermal stability is improved by ∼80–120 °C, and the hardness and elastic modulus by ∼3 and ∼2 times that of pure SU-8, respectively. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.
Highlights
Surface treatments and coatings have provided tremendous achievements in micro-electro-mechanical system (MEMS) industries from metallurgy to processing [1]
After adding the liquid filler (SN 150 or PFPE) in BN, more homogeneous nano-textures were observed over the surface
Textures were generated on the surface, which changed the surface from hydrophilic to hydrophobic
Summary
Surface treatments and coatings have provided tremendous achievements in micro-electro-mechanical system (MEMS) industries from metallurgy to processing [1]. SU-8 is a promising material for generation 3D fabrication It can be used as a coating material in different applications, such as bearing steel [3]. Silicon wafers are used for the fabrication of MEMS devices; they have several disadvantages, such as a low thermal stability, difficulty in 3D fabrication, and non-biocompatibility. These disadvantages can be diminished by introducing a polymer, such as SU-8. Researchers have tried to improve these properties by adding solid fillers, liquid fillers, or a solid with liquid fillers. These solid fillers could be a silicon powder, silicon carbide, graphite, graphene, single and multiwall carbon nanotubes, etc., and the liquid fillers could be perfluoropolyether (PFPE), multiply alkylated cyclopentane
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