Abstract
We report the results of thermal stability study carried out on C/B4C multilayer structure. We have analyzed the structure of as-deposited and vacuum annealed C/B4C multilayer film by soft X-ray reflectivity measurements. We observed that multilayer period expansion continues till 600°C and slight contraction at higher annealing temperature. The results show that the multilayer structure is stable even after 700°C annealing. Raman spectroscopy indicates graphitization of carbon layer with increasing annealing temperature. Graphitization of carbon results in increases of layer thickness and decreases in density as also observed by soft X-ray reflectivity. We observed reduction in measured soft X-ray reflectivity at 6.56 and 4.39nm wavelengths after 800°C annealing. C/B4C multilayer structure has been tested over a period of one year to investigate its temporal stability.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
