Abstract
The effect of heat treatment on the structure and chemical and phase composition of tantalum-containing films with a silicon-carbon matrix has been studied by high-resolution transmission electron microscopy (HRTEM), energy dispersive microanalysis, ultrasoft X-ray emission spectroscopy (USXES), and electron energy-loss spectroscopy (EELS). It was shown that the main cause of the heat treatment influence is the interaction of the material with oxygen. A model of the processes that occur and a method for improving the thermal stability of silicon-carbon nanocomposites are proposed.
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