Abstract
Freestanding absorption filters based on Mo/Si and Mo/ZrSi2 are tested under conditions of long-term heating in vacuum in the temperature range 700–1000°C. The effect of high temperatures on the optical and structural characteristics of the films is studied. The critical thermal loads at which filters maintain their properties during many hours of testing are estimated. The mechanisms for the degradation of filter characteristics upon annealing are determined by means of secondary ion mass spectrometry (SIMS) data and optical measurements.
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More From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
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