Abstract
Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities. In the present study, we investigate the thermal transport in nanomechanical SiN drum resonators by analytical modeling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response. Our analysis shows that radiative heat loss is a non-negligible heat transfer mechanism in nanomechanical SiN resonators, limiting their thermal responsivity and response time. This finding is important for optimal resonator designs for thermal sensing applications as well as cavity optomechanics.
Highlights
In this work, we investigate the heat transfer in nanomechanical silicon nitride (SiN) drum resonators by means of computational simulations and experiments to gain a better understanding of the dominating mechanism
Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities
We investigate the thermal transport in nanomechanical SiN drum resonators by analytical modeling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response
Summary
We investigate the heat transfer in nanomechanical SiN drum resonators by means of computational simulations and experiments to gain a better understanding of the dominating mechanism. We investigate the thermal transport in nanomechanical SiN drum resonators by analytical modeling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response. Our analysis shows that radiative heat loss is a non-negligible heat transfer mechanism in nanomechanical SiN resonators, limiting their thermal responsivity and response time.
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