Abstract

This article describes a method for estimating the temperature of high-power piezoelectric actuators when a direct temperature measurement is impractical. The heat flow is estimated from the real component of the electrical power; then, the temperature is estimated by a transfer function that approximates the thermal response of the system. The transfer function can be derived analytically from a lumped-element approximation or calibrated experimentally by using a system identification method. The proposed method is demonstrated on a piezoelectric stack actuator used in a high-speed nanopositioning device. A second-order transfer function estimates the temperature to within 3 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^{\circ }$</tex-math></inline-formula> C of a reference measurement for a range of operating conditions. The proposed method is suitable for protecting piezoelectric actuators in applications where direct temperature measurement is impractical, for example, due to space or wiring constraints.

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