Abstract
Piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast response and simple construction. However, the hysteresis nonlinear behavior limits the dynamic modeling and tracking control of piezoelectric actuators. This paper studies a dynamic model of a moving stage driven by piezoelectric stack actuator. The Bouc-Wen model is introduced and analyzed to express the nonlinear hysteresis term. Two triangular actuating voltages with frequency of 1 Hz and amplitudes of 80 V and 90 V are applied to drive the piezoelectric stack actuator. The results demonstrate the existence of the hysteresis phenomenon between the input voltage and the output displacement of the piezoelectric stack actuator, and validate the correctness of the model.
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