Abstract

The thermal properties of several barium containing complexes are compared by using thermogravimetric analysis and solids probe mass spectrometry. The properties of complexes containing flourinated and non-fluorinated β-diketonates with and without the presence of a polyether to occupy additional barium coordination sites are compared. Barium complex thermal properties are heavily dependent on the structure of the β-diketones and polyether comprising the complex. Barium complexes containing fluorinated ligands are better suited for chemical vapour deposition of barium than complexes containing non-fluorinated ligands because they efficiently evolve vapours containing barium at lower temperatures.

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