Abstract
A thermal gas flow sensor was developed and evaluated. The presented implementation requires only low-cost manufacturing techniques and readily available components, while maintaining a high level of detection range and sensitivity. Heater and sensing elements were integrated on a flexible substrate and the device was formed by bending the substrate so that the active elements were placed on the external surface of the formed channel, therefore zero flow interference is achieved and a wide variety of fluids can be measured without compromising the sensor integrity. Evaluation was made using air flow rates in the range of 0-65SLPM utilizing electrical measurements and IR imaging techniques simultaneously.
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