Thermal Error Analysis and Compensation Technology for High Precision Aspheric Measuring Platform

Abstract

In this paper, a thermal error analysis and compensation method for a high precision aspheric measuring platform driven by a linear motor system is presented. After analyzing the heat source of thermal deformation, the thermal deformation of guide is selected to be object, and the thermal analysis method of guide in heat balance state is proposed. According to the motor temperature at different positions, the thermal error curve of guide is obtained through simulation. Modeling the global positioning error of measuring platform and the compensation model of thermal error using polynomial fitting, the thermal error compensation experiments is implemented by applying compensation system of measuring platform's controller. The experimental results show that the maximum positioning error in heat balance state is reduced from 1.5μm to 0.7μm, which verify the validity of thermal error compensation model.