Abstract

Platinum diffusion in n-type silicon has been measured using various kinds of spectroscopic techniques for deep energy levels. Platinum acts as an acceptor which captures electrons. An energy level of 0.23±0.02 eV was found for the trap. The diffusion profile can be explained, as in the case of gold, with a kick-out mechanism involving silicon self-interstitials. From the model, an activation energy of 5.01 eV for silicon self-interstitial diffusion can be inferred.

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