Abstract
The equation which represents the decomposition mechanism for two dissolution inhibitors in a chemically amplified positive resist consisting of polyvinylphenol protected with p-t-butoxycarbonylmethyl (BCM-PVP) and p-t-butoxycarbonyl (BOC-PVP) groups was investigated by isothermal thermogravimetry (TG) analysis. The reaction orders of these polymers were different and this difference was caused by the difference in the thermal deprotection reaction of the protecting group. It was shown that the decomposition of BCM-PVP is promoted as decomposition proceeds, which is expressed by the equation. This result indicates that, when BCM-PVP is used as an inhibitor in chemically amplified resists, it is important to determine the baking temperature and duration in order to prevent its decomposition.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
