Abstract
Three process sequences of borophosphosilicate glass (BPSG) reflow have been tested and characterized. A combination of a CVD furnace and rapid thermal annealing has been used to see the impact on the BPSG reflow. Results obtained showed that the RTA process has the potential to compensate for the reduction of the CVD furnace process temperature. SEM micrographs have shown that the new BPSG process sequence exhibits similar glass flow characteristics to the conventional BPSG reflow process. On the other hand, rapid thermal annealing alone is not adequate to completely flow the glass.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
