Abstract
Thermal annealing of n-type liquid phase epitaxial gallium arsenide is examined. It is shown that low 10 15 cm -3 n-type electrically active impurity levels can be reduced to 3 × 10 13 cm -3 by long term annealing. Conversely, it is also shown that p-type liquid phase epitaxial (LPE) gallium arsenide when thermally annealed will show an increase in the net acceptor density. A mechanism for this effect is proposed.
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