Abstract
In this work, the effect of annealing time on structural, optical, and thermal properties of VxOy used as functional material in microbolometer applications is studied. A suitable thermal annealing to three samples composed of eleven alternating layers of vanadium pentoxide (V2O5) and vanadium (V) grown by a sputtering method is applied. These samples were annealed for 30, 40, and 50 min at 300 °C in O2 atmosphere. Raman spectroscopy, Photothermal Deflection Technique “PDT” and Photothermal Deflection Spectroscopy “PDS“ have been employed respectively for microstructure, thermal and optical characterization for VxOy samples. The thermal annealing induces formation of multiphase identified as VO2, V2O5, and V6O13. Also, the studied films showed that the thermal conductivity increases with increasing annealing duration however the gap energy decreases. As important results compared to our previous work, an investigation of thermal and optical properties of vanadium oxide V2O5/V thin films having high (TCR) and low resistivity is presented.
Published Version
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