Abstract
Strontium titanate (SrTiO3) thin film has been deposited on Si (100) substrate using pulsed laser deposition (PLD) technique. Film deposition was carried out at low temperature (150°C) by maintaining the pressure at 10−4 Torr. SrTiO3 film formation on Si substrate was confirmed by SEM, AFM, XRD, and Raman Spectroscopy. SEM and AFM images showed that SrTiO3 film has uniform growth on Si substrate. Raman and XRD spectroscopy also supported the growth of SrTiO3 film on Si(100) substrate. Thermal annealing was carried out to investigate the structural stability of this structure by annealing up to 900°C for 10 min each. Structural changes of SrTiO3/Si were analyzed by mean XRD spectra. The X-Ray diffraction results confirm the crystallinity improvement through atomic arrangements during thermal annealing process. Some oxidation and carbon contamination were also observable since the annealing process was carried out in atmospheric ambience.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
