Abstract
The theory of the formation of the energy spectra of electrons and light ions reflected form a solid surface is constructed. It is shown that methods based on the numerical solution of boundary-value problems for the transport equation are the most effective. The boundary-value problem is solved based on the invariant embedding method. Equations for the reflection coefficients Rk(x, n, n0), describing the flux of atomic particles reflected in the direction n and having experienced k events of elastic scattering are obtained. The obtained results are compared with experimental data, the results of simulation using the Monte Carlo method, and the calculations of other authors.
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