Abstract
The elemental theory of surface acoustic wave (SAW) gas sensor principles is reported within this work. The sensor mechanism is generally based on changes in conductivity of a bi-layer thin sensor structures. In turn, the interaction between electrical surface potential is associated with SAW propagating on piezoelectric and mobile electric charges in bi-layer sensor structures of different electrical conductivities and thicknesses. Both films are very thin in comparison to SAW wavelength and Debye screening length. This allows on one-dimensional treatment of the problem by perturbation theory.
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