Abstract
A theory for data interpretation is presented for a cylindrical Langmuir probe in plasma parallel to the magnetic field direction. The theory is tested in a linear low-temperature plasma device Aline, in a capacitive radio-frequency (RF) discharge. The probe is placed on a 3D manipulator, and a position scan is performed. To exclude strong RF perturbations, the probe is RF compensated. Using the theory, electron densities are obtained from the current at the plasma potential, where no sheath is present. Results are calibrated by line-integrated density measurements of a 26.5 GHz microwave interferometer. Reasonable agreement is observed for probe and interferometer measurements. Furthermore, preceding, more general probe theory is compared to the one developed in the current work and the application limits are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
