Theoretical total ionization cross-sections of CH $\scriptstyle \mathsf {}$ x , CF $\scriptstyle \mathsf {}$ x , SiH $\scriptstyle \mathsf {}$ x , SiF $\scriptstyle \mathsf {}$ x ( $ \mathsf {x=1{-}4}$ ) and CCl $\scriptstyle \mathsf {}$ 4 targets by electron impact

Abstract

Total ionization cross-sections of electron impact are calculated for the molecular targets CHx, CFx, SiHx, SiFx (x = 1-4) and CCl4 at incident energies 20-3 000 eV. The calculation is based on Complex Scattering Potential approach, as developed by us recently. This leads to total inelastic cross-sections, from which the total ionization cross-sections are extracted by reasonable physical arguments. Extensive comparisons are made here with the previous theoretical and experimental data. The present results are satisfactory except for the CFx and SiFx (x = 1-3) radicals, for which the experimental data are lower than most of the theories by more than 50%.