Theoretical simulation of hydrogen glow discharge in the positive column of plasma sources

Abstract

Direct current (DC) glow discharge positive column has played an important role in the field of plasma material surface modification. In this kinetic study of hydrogen glow discharge in the positive column, it is found that electron energy distribution function (EEDF) obviously departs from Maxwell distribution. The EEDF tail moves to higher energy when the ratio between electric field E and density of neutral species N (E/N) increases and the tail moves toward higher energy if hydrogen atom proportion increases at the same E/N. It is also shown that electron temperature augments with the increase of E/N. Additionally, the dissociation ratio percentage of H2 rises with the increase of E/N.