Abstract

This paper analyzes the operation of a new optically addressed deformable mirror device for applications in adaptive optics and optical signal processing. Device operation utilizes a pixellated metallized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A grid of patterned photoresist supports the metallized membrane. A conductive ZnO layer is placed on the backside of the substrate. The device operates as an impedance distribution between two cascaded impedances between the deformable membrane and substrate and the substrate and back electrode. We develop a theoretical model to analyze the deformation as a function of the light intensity and electrical drive

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