Theoretical consideration of high‐sensitivity biosensor using shear horizontal acoustic waves in layered structures

Abstract

AbstractRealization of high‐sensitivity biosensors is required. Acoustic wave‐based biosensors are promising because of their ability to detect immunoreactions. In this paper, a shear horizontal (SH) acoustic wave in layered structures, namely, the Love wave, is discussed on the basis of numerical calculations. To generate the Love wave, a 36YX‐LiTaO3 was chosen as a piezoelectric substrate. SiO2, polymer, and gold were chosen as guiding layer materials. First, the phase velocity and propagation loss were calculated as a function of the layer thickness. Then, an additional mass layer was loaded on the guiding layer to simulate bio‐layer deposition. Simulation results indicate that a highly sensitive biosensor was realized by using a gold guiding layer. © 2012 Wiley Periodicals, Inc. Electron Comm Jpn, 95(4): 27–;32, 2012; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10417