Theoretical Consideration of High-Sensitive Biosensor Using Shear Horizontal Acoustic Waves in Layered Structures

Abstract

Realization of high sensitive biosensors is required. As an acoustic wave based biosensor can detect immunoreactions, it is expected for applying the biosensor. In this paper, a shear horizontal (SH) acoustic wave in layered structures, namely Love wave, is discussed on the basis of numerical calculations. For generating the Love wave, a 36YX-LiTaO3 is chosen as a piezoelectric substrate. Also, SiO2, polymer, and gold are chosen as guiding layer materials. First, phase velocity and propagation loss are calculated as a function of layer thickness. Then, an additional mass layer is loaded on the guiding layer for simulating bio-layer deposition. The simulated results indicate that high sensitive biosensor is realized by using gold guiding layer.