Abstract
The theoretical bulk acoustic wave properties of (103)-oriented AlN films were studied in this research. The (103)-oriented AlN films provided a quasi longitudinal mode and a quasi fast shear mode. For the quasi longitudinal mode, the acoustic velocity is 10717 m/s and the piezoelectric coupling constant (K2) value is 4%. For the quasi fast shear mode, the acoustic velocity is 5957 m/s and the K2 value is 3.8%.
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