Abstract
Integrating the self-assemble sensing film with SAW devices has advantage for organic gas detection. It generally requires a thin metal layer like Au acting as a catalytic base for the sensing film formation. This leads to a double layer SAW device sensing area fabrication consisting of a metal layer deposited on the piezoelectric substrate. Therefore, the SAW characteristics will be affected when propagating through the sensing area. Various layer parameters such as stiffness constants and the thickness are needed for consideration. In this paper, the SAW phase velocities have been calculated theoretically for ST-X Quartz/Gold structure under different normalized thickness configurations.
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