Abstract
The NiTi shape memory alloy is attracting more and more attention inthe fabrication of micro-electrical systems (MEMS) components because ofits special shape memory effect and superelastic properties, especially inmicroactuator and microsensor applications. Laser cutting is one of the methods ofmicro-machining the bulk NiTi alloy. In this study, thin NiTi sheets with a thickness of350 µm were micro-cut using a 355 nm Nd:YAG laser. A qualitative theoretical analysis andexperimental investigations of the process parameters on the kerf profile and cuttingquality were performed. The results show that the kerf profile and cutting quality aresignificantly influenced by the process parameters, such as the single pulse energy, scanspeed, frequency, pass number and beam offset, with the single pulse energy and passnumber having the most significant effects. Based on our analysis, the process parametersare optimized. Debris-free kerf with narrow width () and small taper () is obtained.
Published Version
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