Theoretical and experimental analysis on deflection control of photovoltaic-electrostatic cantilever beam

Yujuan Tang,Zhong Yang,Yusong Chen,Xinjie Wang

doi:10.1177/1687814019863281

Abstract

A model of photovoltaic-electrostatic cantilever beam based on lanthanum-modified lead zirconate titanate ceramic is proposed in this article. New equivalent electrical model of lanthanum-modified lead zirconate titanate ceramic connected to a parallel plate composed of two copper foils is obtained by modifying the original lanthanum-modified lead zirconate titanate equivalent electrical model. After that, the mathematical model of photovoltaic-electrostatic cantilever beam is established. Furthermore, the influences of ultraviolet light intensity and copper foil length on the deflection of the photovoltaic-electrostatic cantilever beam are analyzed via the theoretical and experimental methods. The analysis results indicate that the deflection at the free end of cantilever beam increases with the increase in light intensity and length of the copper foil. The photovoltaic-electrostatic flexible cantilever beam can be taken as a micro-actuator with the advantages of remote control and clean drive.

Highlights

Micro-cantilever beam is a very common structure in micro-mechanical system, and it is commonly used in inertial sensors and actuators
Mathematical modeling of the photovoltaic-electrostatic cantilever beam based on promoted. Lanthanum-modified lead zirconate titanate (PLZT) ceramic
(1) Computer, (2) optical experiment platform, (3) high-impedance electrostatic voltmeter, (4) probe of noncontact displacement sensor, (5) flexible cantilever beam, (6) probe of high-impedance electrostatic voltmeter, (7) UV light source, (8) PLZT ceramic, (9) controller of noncontact displacement sensor. It can be seen from equations (11) and (12) that the deflection wtail at the free end of cantilever beam is related to the driving voltage Ud produced by PLZT ceramic, the material parameters Y and I of the cantilever beam, the length l of the cantilever beam, the dielectric constant eA of air, the distance d between the two copper foils, and the length lcu and width bcu of the copper foil

Summary

Introduction

Micro-cantilever beam is a very common structure in micro-mechanical system, and it is commonly used in inertial sensors and actuators. The equivalent electrical model of PLZT ceramic with external load is deduced, and the mechanics model of photovoltaic-electrostatic cantilever beam via the micro-element method is obtained.

Results

Conclusion