Abstract
A model of photovoltaic-electrostatic driving flexible cantilever beam based on PLZT ceramic is proposed in this paper. New equivalent electrical model of PLZT ceramic connected to a parallel plate composed of two copper foils is obtained by modifying the original PLZT equivalent electrical model. After that, the mechanicalmodel of photovoltaic-electrostatic driving cantilever beam is established. Furthermore, the influences of UV light intensity on the deflection of the photovoltaic-electrostatic cantilever beam are analysed via the theoretical and experimental method. The analysis results indicate that the deflection at the end of cantilever beam increases with the increase of light intensity.
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