Abstract
An investigation of the interaction of oxygen with atomically clean germanium and silicon surfaces has been performed with a very sensitive quartz microbalance housed in an ultra-high vacuum system. Since such studies necessitate rigorous conditions of cleanliness, an omegatron spectrometer has been developed to provide a continuous analysis of the gaseous ambient. Considerable information has been obtained concerning the species introduced into the ambient due to bakeout, ion-bombardment, and other necessary procedures involving the heating of metal, Pyrex, and quartz regions. The apparatus and techniques are described. The effect of the experimental process upon the kinetics of oxidation and thermal restoration of germanium surfaces is discussed.
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