Abstract
Measurements are presented of electron temperature k T e and density N e in a planar electrode system with an rf excited plasma in N 2 gas, as obtained using triple probe method for instantaneous display of medium density plasma parameters. The results are compared with other electrostatic probe methods. We find that the symmetrical triple probe method is in accord with other probe methods in measuring plasma parameters and it has the advantages of simplicity, convenience and rapid response. Thus, the symmetrical triple probe method is suitable for plasma parameter measurements in a PCVD reactor.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have