The use of a symmetrical triple probe for direct reading of plasma parameters in a planar PCVD reactor

Abstract

Measurements are presented of electron temperature k T e and density N e in a planar electrode system with an rf excited plasma in N 2 gas, as obtained using triple probe method for instantaneous display of medium density plasma parameters. The results are compared with other electrostatic probe methods. We find that the symmetrical triple probe method is in accord with other probe methods in measuring plasma parameters and it has the advantages of simplicity, convenience and rapid response. Thus, the symmetrical triple probe method is suitable for plasma parameter measurements in a PCVD reactor.