Abstract
Sheet resistance measurements by the four‐point probe technique have been investigated on diffusions into opposite‐type backgrounds with junction depths from 0.25 to 3.0 µm. Sheet resistances, measured with a probe each of whose four points was weighted with 30–60g and whose tips were five mils in radius, were independent of this loading between 34 and 1570 ohms/sq. As the voltage is varied, sheet resistances show a two‐level effect, followed by a breakdown at 5.5V. The transition takes place, independent of the sheet resistance, at a constant voltage of 100 mV. This transition is explained by the correction factors for a four‐point probe derived from the multilayer potential distribution theory.
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