Abstract
It has been shown that bimaterial microcantilevers can deform as their temperature changes owing to the absorption of infrared radiation. Considering the principle of the cantilever, there must be a temperature detection limit and the microcantilever will be invalid beyond a tolerable temperature. In the paper, we aim to prove the limit and provide an approach to obtain the tolerable target temperature for infrared imaging. A microcantilever array damage experiment using an infrared laser as target was conducted and a method based on optical reflection and CCD measurement principle was proposed to measure the cantilever's critical deflection angle. Furthermore, the tolerable target temperature based on the imaging system was calculated.
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