Abstract
During the past few years, Auger Electron Spectroscopy (AES) has been successfully applied to solving many practical surface chemistry and thin film problems. When used as a surface chemical analytical tool, AES identifies chemical elements present in the first 5-50 Å of a solid surface. The combination of AES and ion sputter etching is used to chemically profile thin films with an in-depth resolution of better than 10% of the thickness of the film. Examples of chemical profiles will be presented which illustrate the good in-depth spatial resolution obtainable using AES combined with ion sputter etching.In the past, the lateral spatial resolution has been limited by the electron gun available in commercial AES equipment.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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