The thermally balanced bridge technique (TBBT): A new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes

Abstract

A new high resolution resistometric measurement technique has been developed in order to perform accurate early resistance change measurements on metal lines submitted to high current densities. This new technique consists of a refined bridge technique resulting in resistance change curves showing only electron-wind induced resistance changes. When performed in a furnace with a high temperature stability the resistance change curves of the individual stripes (test and reference) can be monitored individually with a high resolution.